Tutorial: Understanding Scanning Near-Field Microwave Microscopy

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Understanding Scanning Near-Field Microwave Microscopy

Kamel Haddadi

Institute of Electronics, Microelectronics and Nanotechnology University Lille 1 – Sciences and Technologies, Avenue Poincaré, 59652 Villeneuve d’Ascq, France




Nanotechnology emerges from the physical, chemical, biological and engineering sciences, where novel tools and techniques are developed to probe and manipulate single atoms and molecules. In particular, the introduction of near-field scanning microwave microscopy tools have pioneered many applications, notably including mapping and quantitative measurement of the electromagnetic properties of materials. Basically, the near-field scanning microwave microscope consists of an atomic or scanning tunneling microscope combined with a microwave signal applied to the tip. The tip scans across the sample, emitting a microwave signal scattered by the material, altering its amplitude or/and phase properties. This subject encompasses a broad spectrum of research opportunities in a variety of emerging technologies. This tutorial will afford the participant an extensive treatment of the field of microwave microscopy, its foundation, theory, techniques and related instrumentations. Additionally, the tutorial will introduce the participants to the state-of-the-art as well as the state-of-the-practice. Finally, emerging and likely future trends in this field will be introduced. The discussion will be illustrated with several real-world examples. The Tutorial is intended primarily for young scientists and engineers who are interested in learning about this emerging field, but is also useful for individuals with a more advanced understanding of related concepts. 


K. Haddadi received the MSc degree and the Ph.D. degree from the University of Lille 1, France, in 2003 and 2007, respectively. He is currently an Associate Professor at the University of Lille 1 and the Institute of electronics, de Microelectronics and Nanotechnology (IEMN), Villeneuve d’Ascq, France. His research interests are in the areas of microwave and millimeter-wave instrumentation, characterization and modeling of devices and materials, design of multi-port RF systems for metrology and communications and high-frequency characterization of nanometer devices.